Solar Power Panel Manufacture

Porvair Filtration Group GasPro™ high purity filters are selected for critical gas distribution and delivery systems that are part of the thin film deposition process used to make photovoltaic devices. Our GasPro™ filters for the solar power panel industry are offered in PTFE (Teflon™) membrane, polypropylene, 316L Sinterflo^® F sintered metal fibre, 316L Sinterflo^® P sintered metal powder, nickel fibre, nickel sintered powder and Hastelloy^® C22 sintered powder.

 Applications

• Process gases used in Plasma Enhanced Chemical Vapour Deposition (PECVD) systems for the manufacture of solar cell panels
• Dopant gases used for deposition on CDs, disc drive and optical devices, as well as gases used in modified Chemical Vapour Deposition (CVD) process for optical fibre manufacture
• Processing gases for manufacturing the front glass used for photocells and solar panels.

Features and benefits

• Increased yield and efficiency of thin film deposition process
• Protection of process equipment such as vacuum pumps in PECVD process gas handling equipment
• Removal of particles - removal of toxic and abrasive particles from exhaust gases
• High efficiency filtration of gases - high efficiency filtration of bulk, specialty and onsite generated gases such as N₂, H₂, Ar, F₂, NF₃, He and Silane
• Last chance filters - POU filters for last chance removal of particles
• Maximum cleanliness - deionized water pressure washed and high pressure N₂ flush to maximize out of box cleanliness
• Application and service environment - filters are available with less stringent wetted hardware surface specifications and with larger filter grades depending on the application and the service environment.

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For cross-reference lists, please contact info@porvairfiltration.com