GasPro™ In-Line Gas Filters
Porvair GasPro™ high purity gas filtration products protect critical processes from potential defect causing, yield limiting particles. These in-line gas filters are installed at the point-of-source for complete line protection or at the point-of-use to protect etch, CVD, PVD, thermal, and other critical dry processes.
Regardless of process gas and flow, Porvair's broad range of in-line gas filter options can meet the requirement. Porvair filtration medias include PTFE and sintered 316L stainless steel, nickel, and Hastelloy® C22 in electro-polished 316L stainless steel (or Hastelloy® C22) housings.
To fit a wide range of applications, GasPro™ filters are available with a wide variety of end connections and sizes. Fitting choices include male and female face seal (VCR®), butt weld, compression, and NPT connections, depending on the filter. Fitting sizes can range from ¼” to 1 ½”. Metric sizes are available upon request.
Features and benefits
- Superior filter efficiency
Our porous PTFE and sintered metal filters are proven to provide greater than 9 LRV (99.9999999%) particle retention efficiency at 0.003μm (3 nanometers) and at the most penetrating particle size of 0.8 microns.
- Service in severe environments
Porous Sinterflo® sintered metal media provides excellent mechanical strength, enhanced corrosion resistance and elevated temperature service in severe environments. PTFE membranes are highly compatible with every process gas.
- Temperature resistance
GasPro™ filters are available for elevated temperature service up to 500°C (930°F) and an all Hastelloy® C22 construction is rated for 700°C (1290°F) in inert gas applications.
- Cleanliness and best in class quality
Our point of use filters are manufactured in a Class 100 Cleanroom using an ISO 9001 Certified Quality System. This insures particle free, chemically clean, organic free handling and bagging, maximizing the out-of-package cleanliness. A DI water flush and a high pressure, 0.003μm filtered nitrogen flush removes particles and prevents particle shedding. Most GasPro™ filters are vacuum dried to less than 10ppb moisture and the organics are less than 10ppb THC.
